equipment | Lithography and Wafer Bonding

Developer Wet Benches

Photoresist Developer Wet Bench (Located in the Yellow Room, 819F)

 

 

E-Beam Developer Wet Bench (Located in the E-Beam Room, 819E)

Safety Guidlines

Photoresist Developer Station SOP
SOP for the Developer Station in the Yellow Room
Download
E-Beam Developer Station SOP
SOP for the Developer Station in the E-Beam Room
Download

Point of Contact

James Burnette

Manager, Cleanroom and Shared Instrumentation Facilities

Aleena Saeed

Nanofabrication Engineer

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