equipment | Metrology

Filmetrics F40-UV film thickness monitor


Applications

  • Thickness measurements of thin films
  • Measurement of index of refraction of thin films

Specs

  • Thickness measurement range: 40nm-40µm
  • 190-1100 nm wavelength range
  • 7 µm spot size

Allowed User Materials

  • Wafers or wafer pieces (new or previously processed)
  • Metals
  • Dielectrics

Example Processes:

Thickness measurement of a thin SiO2 or SiNx film

Safety Guidlines


Filmetrics F40 UV Standard Operating Procedure
Filmetrics F40 UV Standard Operating Procedure