equipment | Metrology

Filmetrics F40-UV film thickness monitor


Applications

  • Thickness measurements of thin films
  • Measurement of index of refraction of thin films

Specs

  • Thickness measurement range: 40nm-40µm
  • 190-1100 nm wavelength range
  • 7 µm spot size

Allowed User Materials

  • Wafers or wafer pieces (new or previously processed)
  • Metals
  • Dielectrics

Example Processes:

Thickness measurement of a thin SiO2 or SiNx film

Safety Guidlines


Filmetrics F40 UV Standard Operating Procedure
Filmetrics F40 UV Standard Operating Procedure

Point of Contact


James Burnette

Manager, Cleanroom and Shared Instrumentation Facilities

Aleena Saeed

Nanofabrication Engineer